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2015 IEEE International Electron Devices Meeting (IEDM)最新文献

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Solving the paradox of the inconsistent size dependence of thermal stability at device and chip-level in perpendicular STT-MRAM 解决垂直STT-MRAM器件级和芯片级热稳定性尺寸依赖关系不一致的矛盾
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409773
L. Thomas, G. Jan, S. Le, Yuan-Jen Lee, Huanlong Liu, Jian Zhu, S. Serrano-Guisan, R. Tong, K. Pi, D. Shen, R. He, J. Haq, Z. Teng, R. Annapragada, V. Lam, Yu-Jen Wang, T. Zhong, T. Torng, P. Wang
Current understanding of thermal stability of perpendicular STT-MRAM based on device-level data suggests that the thermal stability factor A is almost independent of device diameter above ~30nm. Here we report that contrary to this conventional wisdom, chip-level data retention exhibits substantial size dependence for diameters between 55 and 100 nm. We show that the method widely used to measure A is inaccurate for devices larger than ~30 nm, leading to significant underestimation of the size dependence. We derive an improved model, allowing us to reconcile the size dependence of A measured at device and chip level.
目前基于器件级数据对垂直STT-MRAM热稳定性的理解表明,热稳定性因子A几乎与~30nm以上的器件直径无关。在这里,我们报告了与传统观点相反的是,芯片级数据保留在直径在55到100纳米之间表现出实质性的尺寸依赖性。我们表明,广泛用于测量A的方法对于大于~30 nm的器件是不准确的,导致对尺寸依赖性的严重低估。我们推导了一个改进的模型,使我们能够协调在器件和芯片水平上测量的A的尺寸依赖性。
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引用次数: 30
200mm GaN-on-Si epitaxy and e-mode device technology 200mm GaN-on-Si外延和e-mode器件技术
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409709
D. Marcon, Y. Saripalli, S. Decoutere
In this work, three types of high-voltage buffer architectures for GaN-on-200mm-Si epitaxy are compared and discussed. Two device architectures, recessed gate MISHEMTs and p-GaN HEMTs technology, to obtain e-mode operation developed on these buffers are also discussed. Threshold voltage/output current tuning, threshold voltage stability and possible issues are highlighted. A possible device architecture that combines the best of the two approaches is proposed together with preliminary test results.
本文对三种用于GaN-on-200mm-Si外延的高压缓冲结构进行了比较和讨论。本文还讨论了在这些缓冲器上实现电子模式操作的两种器件架构,即嵌入式栅极HEMTs和p-GaN HEMTs技术。强调了阈值电压/输出电流调谐,阈值电压稳定性和可能的问题。结合两种方法的优点,提出了一种可能的器件架构,并提供了初步测试结果。
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引用次数: 66
New challenges and opportunities for 3D integrations 3D集成的新挑战和机遇
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409655
J. Michailos, P. Coudrain, A. Farcy, N. Hotellier, S. Chéramy, S. Lhostis, E. Deloffre, Y. Sanchez, A. Jouve, F. Guyader, E. Saugier, V. Fiori, P. Vivet, M. Vinet, C. Fenouillet-Béranger, F. Casset, P. Batude, F. Breuf, Y. Henrion, B. Vianne, L. Collin, J. Colonna, L. Benaissa, L. Brunet, R. Prieto, R. Vélard, F. Ponthenier
From low density 3D integrations embedding Via Last Through Silicon Vias (TSV) to high densities hybrid bonding or 3D VSLI CoolCubeTM solutions, a multitude of new product opportunities is now envisioned. An overview of existing emerging 3D integrations is provided covering Image sensors, Photonics, MEMS, Wide I/O memories and Silicon Interposers for advanced logics. Associated key challenges and developments are highlighted focusing on 3D platform performance assessment.
从低密度3D集成嵌入通过最后通过硅孔(TSV)到高密度混合键合或3D VSLI CoolCubeTM解决方案,现在设想了许多新产品的机会。概述了现有的新兴3D集成,涵盖图像传感器,光子学,MEMS,宽I/O存储器和用于先进逻辑的硅中间层。相关的关键挑战和发展重点是3D平台的性能评估。
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引用次数: 12
Enhancement-mode GaN double-channel MOS-HEMT with low on-resistance and robust gate recess 具有低导通电阻和坚固栅极凹槽的增强型GaN双通道MOS-HEMT
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409662
Jin Wei, Sheng-gen Liu, Baikui Li, Xi Tang, Yunyou Lu, Cheng Liu, M. Hua, Zhaofu Zhang, Gaofei Tang, K. J. Chen
An enhancement-mode GaN double-channel MOS-HEMT (DC-MOS-HEMT) was fabricated on a double-channel heterostructure, which features a 1.5-nm AlN layer (AlN-ISL) inserted 6 nm below the conventional barrier/GaN hetero-interface, forming a lower channel at the interface between AlN-ISL and the underlying GaN. With the gate recess terminated at the upper GaN channel layer, a positive threshold voltage is obtained, while the lower channel retains its high 2DEG mobility as the heterojunction is preserved. The fabricated device delivers a small on-resistance, large current, high breakdown voltage, and sharp subthreshold swing. The large tolerance for gate recess depth is also confirmed by both simulation and experiment.
在双通道异质结构上制备了一种增强型GaN双通道MOS-HEMT (DC-MOS-HEMT),其特点是在常规势垒/GaN异质界面下方6 nm处插入1.5 nm的AlN层(AlN- isl),在AlN- isl与底层GaN的界面处形成一个下通道。当栅极凹槽终止于上层GaN沟道层时,获得正阈值电压,而下层沟道由于保留异质结而保持其高2DEG迁移率。制造的器件提供小导通电阻,大电流,高击穿电压和尖锐的亚阈值摆幅。通过仿真和实验验证了浇口凹槽深度的较大公差。
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引用次数: 43
Optical performance study of BSI image sensor with stacked grid structure 叠栅结构BSI图像传感器光学性能研究
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409801
Yun-Wei Cheng, T. Tsai, Chun-Hao Chou, Kuo-cheng Lee, Hsin-Chi Chen, Yung-Lung Hsu
Stacked grid structure is implemented into back-side illumination (BSI) image sensors and device performance for various grid design including dimension and height has been investigated. Simulated angular response shows less quantum efficiency (QE) degradation in large incident angle and SNR-10 has a ~10% improvement for devices with stacked grid structure.
将堆叠网格结构应用于背面照明(BSI)图像传感器中,研究了不同尺寸和高度的网格设计对器件性能的影响。模拟的角响应表明,在大入射角下,量子效率(QE)下降较小,采用堆叠网格结构的器件的信噪比(SNR-10)提高了约10%。
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引用次数: 6
Crystalline-as-deposited ALD phase change material confined PCM cell for high density storage class memory 用于高密度存储级存储器的晶体沉积ALD相变材料限制PCM电池
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409621
M. B. Sky, N. Sosa, T. Masuda, W. Kim, S. Kim, A. Ray, R. Bruce, J. Gonsalves, Y. Zhu, K. Suu, C. Lam
We show, for the first time, a robust high aspect ratio (~4:1) confined PCM cell which utilizes a dense and highly reliable nano-crystalline-as-deposited ALD phase change material. The 33nm diameter pore structures were filled utilizing an in-situ metal nitride liner plus nano-crystalline ALD Ge-Sb-Te material. The tuned process for depositing and integrating the phase change material brings the programming endurance to beyond 2.8×1011. We demonstrate a fast programming speed of 80ns with 10x switching and, with the aid of simulation, show a path for these elements to create a high density PCM cell suitable for Storage Class Memory.
我们首次展示了一种坚固的高宽高比(~4:1)限制PCM电池,该电池利用致密且高度可靠的纳米晶体沉积ALD相变材料。利用原位金属氮化物衬垫和纳米晶ALD Ge-Sb-Te材料填充直径为33nm的孔结构。用于沉积和集成相变材料的调谐过程使编程耐久性超越2.8×1011。我们展示了80ns的快速编程速度和10倍的开关,并在仿真的帮助下,展示了这些元件创建适合存储级存储器的高密度PCM单元的路径。
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引用次数: 19
Non volatile memory evolution and revolution 非易失性存储器的演变和革命
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409666
P. Cappelletti
For over 40 years, the evolution of Non Volatile Memories has been mostly based on the floating gate MOS transistor. We have successfully succeeded in scaling this wonderful device below 20nm but we are now approaching the limit. It is time for disruptive innovations, either integrating the same basic device in a vertical structure or moving to totally different device concepts. This paper analyzes the different alternatives in relation to their areas of application.
40多年来,非易失性存储器的发展主要是基于浮栅MOS晶体管。我们已经成功地将这个奇妙的装置缩小到20nm以下,但我们现在正在接近极限。现在是颠覆性创新的时候了,要么将相同的基本设备整合到垂直结构中,要么转向完全不同的设备概念。本文根据不同的应用领域分析了不同的替代方案。
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引用次数: 71
GaN-on-GaN p-n power diodes with 3.48 kV and 0.95 mΩ-cm2: A record high figure-of-merit of 12.8 GW/cm2 具有3.48 kV和0.95 mΩ-cm2的GaN-on-GaN p-n功率二极管:创纪录的12.8 GW/cm2的高品质系数
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409665
K. Nomoto, Z. Hu, B. Song, M. Zhu, M. Qi, R. Yan, V. Protasenko, E. Imhoff, J. Kuo, N. Kaneda, T. Mishima, T. Nakamura, D. Jena, H. Xing
We report GaN p-n diodes on free-standing GaN substrates: a record high Baliga's figure-of-merit (V<;sub>B<;/sub><;sup>2<;/sup>/ Ron) of 12.8 GW/cm<;sup>2<;/sup> is achieved with a 32 μm drift layer and a diode diameter of 107 μm exhibiting a BV > 3.4 kV and a R<;sub>on<;/sub> <; 1 mΩ-cm<;sup>2<;/sup>. The leakage current density is low: 10<;sup>-3<;/sup> - 10<;sup>-4<;/sup> A/cm<;sup>2<;/sup> at 3 kV. A record low ideality factor of 1.1-1.3 is signature of high GaN quality. These are among the best-reported GaN p-n diodes.
我们报道了独立GaN衬底上的GaN p-n二极管:在32 μm的漂移层和107 μm的二极管直径下,实现了创纪录的12.8 GW/cm2的Baliga品质系数(VB2/ Ron), BV > 3.4 kV, Ron 2。泄漏电流密度低,在3kv时为10-3 - 10-4 A/cm2。理想因子在1.1-1.3之间达到创纪录的低水平,是高氮化镓质量的标志。这些都是报道得最好的GaN p-n二极管。
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引用次数: 50
Multi-storied photodiode CMOS image sensor for multiband imaging with 3D technology 多层光电二极管CMOS图像传感器的多波段成像与三维技术
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409798
Y. Takemoto, K. Kobayashi, M. Tsukimura, N. Takazawa, H. Kato, S. Suzuki, J. Aoki, T. Kondo, H. Saito, Y. Gomi, S. Matsuda, Y. Tadaki
We demonstrated multiband imaging with a multi-storied photodiode CMOS image sensor (CIS), which comprises two individually functioning layered devices that achieve optimized images in different substrates bonded by 3D technology. The sensor is able to capture a wide variety of multiband images, which is not limited to conventional visible RGB (Red Green Blue) images taken with a Bayer filter or to invisible infrared (IR) images, at the same time without any color or image degradation even with an extra IR light source. Its wide range sensitivity enables us to select the specific narrow band light wave with specific optical filter in addition to visible RGB images. This wide selection of specific wavelengths of light is useful for specific applications like medical systems to identify pathological lesions and also enables additional functions on the same sensor to make such systems smarter, smaller, and cheaper than the conventional combination of IR imaging sensors with RGB image ones. A wide selection of multiband images is also possible with our device by modifying the top semiconductor layer thickness or changing the characteristics of a color filter on the top substrate to cover a wide range of application needs.
我们展示了多层光电二极管CMOS图像传感器(CIS)的多波段成像,该传感器由两个独立功能的分层器件组成,通过3D技术在不同的衬底上实现优化图像。该传感器能够捕获各种各样的多波段图像,不仅限于使用拜耳滤光片拍摄的常规可见RGB(红绿蓝)图像或不可见红外(IR)图像,同时即使使用额外的红外光源也不会出现任何颜色或图像退化。它的宽范围灵敏度使我们能够选择特定的窄带光波与特定的滤光片,除了可见的RGB图像。这种广泛选择特定波长的光对于医疗系统等特定应用非常有用,可以识别病理病变,并且还可以在同一传感器上实现附加功能,使此类系统比传统的红外成像传感器与RGB图像传感器的组合更智能、更小、更便宜。我们的器件还可以通过修改顶部半导体层厚度或改变顶部衬底上的彩色滤光片的特性来选择广泛的多波段图像,以满足广泛的应用需求。
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引用次数: 8
First foundry platform of complementary tunnel-FETs in CMOS baseline technology for ultralow-power IoT applications: Manufacturability, variability and technology roadmap 超低功耗物联网应用CMOS基线技术互补隧道场效应管的首个代工平台:可制造性、可变性和技术路线图
Pub Date : 2015-12-01 DOI: 10.1109/IEDM.2015.7409756
Qianqian Huang, Rundong Jia, Cheng Chen, Hao Zhu, Lingyi Guo, Junyao Wang, Jiaxin Wang, Chunlei Wu, Runsheng Wang, Weihai Bu, Jin Kang, Wenbo Wang, Hanming Wu, Shiuh-Wuu Lee, Yangyuan Wang, Ru Huang
We have first manufactured Complementary Tunnel-FETs (C-TFETs) in standard 12-inch CMOS foundry. With abrupt tunnel junction consideration for improved TFET performance, technology of monolithically integrating C-TFET with CMOS is developed. Planar Si C-TFET inverter is also demonstrated, indicating a new electrical isolation requirement between neighboring devices for practical C-TFET integration on bulk substrate. For high-volume production, the variability of C-TFETs are experimentally investigated, demonstrating an intrinsic trade-off between performance enhancement and variability suppression induced by dominant variation source in traditional TFETs, which is mainly impacted by the band-to-band tunneling generation area. By new TFET device design, improved performance and variability simultaneously are experimentally achieved, and circuit-level implementation shows significant operation speed enhancement (up to 93%) and energy reduction (by 66%) at VDD of 0.4V, as well as remarkably suppressed variation, indicating its great potential for ultralow-power applications.
我们首次在标准的12英寸CMOS代工厂制造了互补隧道fet (c - tfet)。为了提高ttfet的性能,考虑到突变隧道结,开发了c - ttfet与CMOS的单片集成技术。平面硅C-TFET逆变器也被展示,表明相邻器件之间的新的电气隔离要求,以实际集成在大块衬底上的C-TFET。为了大批量生产,实验研究了c - tfet的可变性,证明了传统tfet中主要受带间隧穿产生面积影响的主要变化源导致的性能增强和可变性抑制之间的内在权衡。通过新的ttfet器件设计,实验上同时实现了性能和可变性的改善,并且在VDD为0.4V时,电路级实现显示出显着的运行速度提高(高达93%)和能量降低(66%),并且显著抑制了变化,表明其在超低功耗应用中的巨大潜力。
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引用次数: 30
期刊
2015 IEEE International Electron Devices Meeting (IEDM)
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