首页 > 最新文献

2017 Silicon Nanoelectronics Workshop (SNW)最新文献

英文 中文
Investigation on the Vdd scaling limit of stochastic computing circuits based on FinFET technology 基于FinFET技术的随机计算电路Vdd缩放极限研究
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242341
Xiaobo Jiang, Runsheng Wang, Shaofeng Guo, Ru Huang
The scaling limits of supply voltage (Vdd) in stochastic computing are investigated based on foundry-level 16/14nm FinFET technology, considering inherent, static and transient variations. Circuit functionality, EDP, arithmetic error are examined, indicating that transient variation induced arithmetic bias is the dominating factor.
基于晶圆厂级16/14nm FinFET技术,考虑固有、静态和瞬态变化,研究了随机计算中电源电压(Vdd)的缩放极限。测试了电路功能、EDP和算术误差,表明瞬态变化引起的算术偏差是主要因素。
{"title":"Investigation on the Vdd scaling limit of stochastic computing circuits based on FinFET technology","authors":"Xiaobo Jiang, Runsheng Wang, Shaofeng Guo, Ru Huang","doi":"10.23919/SNW.2017.8242341","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242341","url":null,"abstract":"The scaling limits of supply voltage (Vdd) in stochastic computing are investigated based on foundry-level 16/14nm FinFET technology, considering inherent, static and transient variations. Circuit functionality, EDP, arithmetic error are examined, indicating that transient variation induced arithmetic bias is the dominating factor.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"122 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124514937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Parameter calibration of drift-diffusion model in quasi-ballisitc transport region with Monte Carlo method 准弹道输运区漂移扩散模型的蒙特卡罗参数定标
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242303
Lei Shen, S. Di, L. Yin, Xiaoyan Liu, G. Du
As the device scaling down to sub-10nm, the quasi-ballistic transport becomes important. Some previous works have suggested using DD method to involve the quasi-ballistic transport effect through modifying the transport parameters. A procedure is introduced to calibrate the transport parameters of the DD model by using the simulation results of MC device simulator.
随着器件尺寸缩小到10nm以下,准弹道输运变得非常重要。以前的一些工作建议通过修改输运参数,采用DD方法来考虑准弹道输运效应。介绍了一种利用MC设备模拟器的仿真结果标定DD模型传输参数的方法。
{"title":"Parameter calibration of drift-diffusion model in quasi-ballisitc transport region with Monte Carlo method","authors":"Lei Shen, S. Di, L. Yin, Xiaoyan Liu, G. Du","doi":"10.23919/SNW.2017.8242303","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242303","url":null,"abstract":"As the device scaling down to sub-10nm, the quasi-ballistic transport becomes important. Some previous works have suggested using DD method to involve the quasi-ballistic transport effect through modifying the transport parameters. A procedure is introduced to calibrate the transport parameters of the DD model by using the simulation results of MC device simulator.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128003966","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Simulation study on temprature dependence of MOSFET and TFET-based pH-sensitive ISFET MOSFET和基于tfet的ph敏感ISFET温度依赖性的仿真研究
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242313
Sihyun Kim, D. Kwon, Ryoongbin Lee, D. Kim, Byung-Gook Park
The temperature dependence of MOSFET and TFET-based pH sensitive ISFET was investigated through TCAD device simulation. The transfer characteristics and the pH sensitivities of both devices at various temperature were compared. TFET-based ISFET exhibits superior thermal stability in contrast with the MOSFET-based ISFET due to the difference of conduction mechanism.
通过TCAD器件仿真研究了MOSFET和基于tfet的pH敏感ISFET的温度依赖性。比较了两种器件在不同温度下的传递特性和pH灵敏度。由于传导机制的不同,tfet基ISFET表现出优于mosfet基ISFET的热稳定性。
{"title":"Simulation study on temprature dependence of MOSFET and TFET-based pH-sensitive ISFET","authors":"Sihyun Kim, D. Kwon, Ryoongbin Lee, D. Kim, Byung-Gook Park","doi":"10.23919/SNW.2017.8242313","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242313","url":null,"abstract":"The temperature dependence of MOSFET and TFET-based pH sensitive ISFET was investigated through TCAD device simulation. The transfer characteristics and the pH sensitivities of both devices at various temperature were compared. TFET-based ISFET exhibits superior thermal stability in contrast with the MOSFET-based ISFET due to the difference of conduction mechanism.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"148 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131985070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Effects of nitride trap layer properties on location of charge centroid in charge-trap flash memory 氮阱层性质对电荷阱快闪存储器中电荷质心位置的影响
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242306
Seunghyun Kim, Do-Bin Kim, Eunseon Yu, Sang-Ho Lee, Seongjae Cho, Byung-Gook Park
In this study, the effects of nitride trap layer properties on location of charge centroid in charge-trap flash (CTF) memory are closely investigated. In the operations of CTF memories, charges tunnel into the nitride layer through thin oxide, unlike the floating-gate (FG) type flash memory where the charges are stored in the conductive poly-crystalline Si. Deeper understanding of distribution of the trapped charges should be beneficial in setting up an accurate compact model of CTF memory cell, where the charge centroid becomes a very practical means by which a rather large number of trapped electrons can be dealt in the more mathematical manner as a whole electron cloud. The relation between charge centroid and program voltage (Kpgm) depending on nitride layer properties is analytically studied.
本文研究了氮阱层性质对电荷阱闪存(CTF)存储器中电荷质心位置的影响。在CTF存储器的操作中,电荷通过薄氧化物隧道进入氮化层,而不像浮栅(FG)型闪存,电荷存储在导电多晶硅中。对捕获电荷分布的深入了解有助于建立CTF存储电池的精确紧凑模型,其中电荷质心成为一种非常实用的方法,通过这种方法可以更数学地将大量捕获电子作为整个电子云处理。分析了电荷质心与程序电压(Kpgm)随氮层性质的变化关系。
{"title":"Effects of nitride trap layer properties on location of charge centroid in charge-trap flash memory","authors":"Seunghyun Kim, Do-Bin Kim, Eunseon Yu, Sang-Ho Lee, Seongjae Cho, Byung-Gook Park","doi":"10.23919/SNW.2017.8242306","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242306","url":null,"abstract":"In this study, the effects of nitride trap layer properties on location of charge centroid in charge-trap flash (CTF) memory are closely investigated. In the operations of CTF memories, charges tunnel into the nitride layer through thin oxide, unlike the floating-gate (FG) type flash memory where the charges are stored in the conductive poly-crystalline Si. Deeper understanding of distribution of the trapped charges should be beneficial in setting up an accurate compact model of CTF memory cell, where the charge centroid becomes a very practical means by which a rather large number of trapped electrons can be dealt in the more mathematical manner as a whole electron cloud. The relation between charge centroid and program voltage (Kpgm) depending on nitride layer properties is analytically studied.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129568038","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
RRAM based convolutional neural networks for high accuracy pattern recognition and online learning tasks 基于RRAM的卷积神经网络用于高精度模式识别和在线学习任务
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242339
Zhen Dong, Z. Zhou, Z.F. Li, C. Liu, Y. Jiang, P. Huang, L.F. Liu, X.Y. Liu, J. Kang
In this work, we conduct research on optimizing schemes for the RRAM-based implementation of CNN. Our main achievements contain: 1) A concrete CNN circuit and corresponding operation methods are developed. 2) Quantification methods for utilizing binary or multilevel RRAM as synapses are proposed, and our CNN performs with 98% accuracy on the MNIST dataset using multilevel RRAM and 97% accuracy using binary RRAM. 3) Influence of the number and size of kernels, as well as the device conductance variation on final recognition accuracy is studied in detail. 4) Online learning tasks are performed using the developed CNN system with binary STDP protocol, and 94.6% accuracy on average is achieved.
在这项工作中,我们对基于ram的CNN实现的优化方案进行了研究。我们的主要成果包括:1)开发了一个具体的CNN电路和相应的操作方法。2)提出了使用二进制或多层RRAM作为突触的量化方法,我们的CNN在使用多层RRAM的MNIST数据集上的准确率为98%,使用二进制RRAM的准确率为97%。3)详细研究了核数、核尺寸以及器件电导变化对最终识别精度的影响。4)使用开发的CNN系统,采用二进制STDP协议进行在线学习任务,平均准确率达到94.6%。
{"title":"RRAM based convolutional neural networks for high accuracy pattern recognition and online learning tasks","authors":"Zhen Dong, Z. Zhou, Z.F. Li, C. Liu, Y. Jiang, P. Huang, L.F. Liu, X.Y. Liu, J. Kang","doi":"10.23919/SNW.2017.8242339","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242339","url":null,"abstract":"In this work, we conduct research on optimizing schemes for the RRAM-based implementation of CNN. Our main achievements contain: 1) A concrete CNN circuit and corresponding operation methods are developed. 2) Quantification methods for utilizing binary or multilevel RRAM as synapses are proposed, and our CNN performs with 98% accuracy on the MNIST dataset using multilevel RRAM and 97% accuracy using binary RRAM. 3) Influence of the number and size of kernels, as well as the device conductance variation on final recognition accuracy is studied in detail. 4) Online learning tasks are performed using the developed CNN system with binary STDP protocol, and 94.6% accuracy on average is achieved.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130934711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
In-depth analysis of self-heating effects in vertical nanoplate-shaped GAAFETs 垂直纳米板形gaafet自热效应的深入分析
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242300
Dokyun Son, Ilho Myeong, Hyunsuk Kim, Myounggon Kang, Hyungcheol Shin
Self-heating effects (SHEs) were studied on the vertical nanoplate-shaped gate-all-around (GAA) FETs (vNPFETs) as a target of 5nm node technology. The thermal properties are compared between face-up and face-down configuration. Decreasing the channel width is vulnerable to both configurations in terms of SHEs due to the reduced area of heat dissipation. It is well known that the SHE is alleviated on AC condition, while our results show that the SHE is still important in vNPFET on AC condition.
以5nm节点技术为目标,研究了垂直纳米板状栅极全能(GAA)场效应管(vnpfet)的自热效应(SHEs)。比较了面朝上和面朝下结构的热性能。由于散热面积的减少,减小通道宽度对两种配置的she都是脆弱的。众所周知,在交流条件下,SHE得到了缓解,而我们的研究结果表明,在交流条件下,SHE在vNPFET中仍然很重要。
{"title":"In-depth analysis of self-heating effects in vertical nanoplate-shaped GAAFETs","authors":"Dokyun Son, Ilho Myeong, Hyunsuk Kim, Myounggon Kang, Hyungcheol Shin","doi":"10.23919/SNW.2017.8242300","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242300","url":null,"abstract":"Self-heating effects (SHEs) were studied on the vertical nanoplate-shaped gate-all-around (GAA) FETs (vNPFETs) as a target of 5nm node technology. The thermal properties are compared between face-up and face-down configuration. Decreasing the channel width is vulnerable to both configurations in terms of SHEs due to the reduced area of heat dissipation. It is well known that the SHE is alleviated on AC condition, while our results show that the SHE is still important in vNPFET on AC condition.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"142 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116547363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Evaluation of multilevel memory capability of ReRAM using Ta2O5 insulator and different electrode materials 采用Ta2O5绝缘体和不同电极材料的ReRAM多层存储性能评价
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242309
Yuanlin Li, Reon Katsumura, Mika Grönroos, A. Tsurumaki‐Fukuchi, M. Arita, H. Andoh, T. Morie, Yasuo Takahashi
ReRAM (Resistive Random Access Memory) has been drawing attention for its neural network applications with low-power and high-speed operation. The multilevel data storage capability is inherently needed to use the ReRAM as synaptic devices. In this study, two ReRAM devices with different electrode materials in which the operation mechanisms are thought to be different was fabricated and tested. It was clarified that the multilevel resistance characteristics were achieved in both devices.
电阻式随机存取存储器(ReRAM)以其低功耗、高速运行的神经网络应用而备受关注。使用ReRAM作为突触设备,需要具有多层数据存储能力。在本研究中,制备了两种不同电极材料的ReRAM器件,并对其操作机制进行了测试。结果表明,两种器件均实现了多电平电阻特性。
{"title":"Evaluation of multilevel memory capability of ReRAM using Ta2O5 insulator and different electrode materials","authors":"Yuanlin Li, Reon Katsumura, Mika Grönroos, A. Tsurumaki‐Fukuchi, M. Arita, H. Andoh, T. Morie, Yasuo Takahashi","doi":"10.23919/SNW.2017.8242309","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242309","url":null,"abstract":"ReRAM (Resistive Random Access Memory) has been drawing attention for its neural network applications with low-power and high-speed operation. The multilevel data storage capability is inherently needed to use the ReRAM as synaptic devices. In this study, two ReRAM devices with different electrode materials in which the operation mechanisms are thought to be different was fabricated and tested. It was clarified that the multilevel resistance characteristics were achieved in both devices.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133722215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of self-heating effects in vertical MOSFETs according to device geometry 垂直mosfet的自热效应分析
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242299
Ilho Myeong, Dokyun Son, Hyunsuk Kim, Myounggon Kang, Hyungcheol Shin
In this paper, the Self-Heating Effects in Vertical FETs(VFET) have been investigated according to device geometry. It is demonstrated that the temperature of the device increases by using a low-k dielectric and an air gap between the metal lines. In addition, when air spacers are used, the lattice temperature is further increased and the on current reduction ratio increases compared to the common spacer. Also, to release the thermal bottleneck to the substrate side, the metal pad size was adjusted and the composition of the Shallow Trench Isolation (SII) was changed.
本文根据器件的几何结构,研究了垂直场效应管(VFET)的自热效应。结果表明,使用低k介电介质和金属线之间的气隙可以提高器件的温度。此外,与普通隔离剂相比,空气隔离剂的使用进一步提高了晶格温度,增加了电流还原比。此外,为了将热瓶颈释放到基板侧,调整了金属垫的尺寸,并改变了浅沟隔离(SII)的组成。
{"title":"Analysis of self-heating effects in vertical MOSFETs according to device geometry","authors":"Ilho Myeong, Dokyun Son, Hyunsuk Kim, Myounggon Kang, Hyungcheol Shin","doi":"10.23919/SNW.2017.8242299","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242299","url":null,"abstract":"In this paper, the Self-Heating Effects in Vertical FETs(VFET) have been investigated according to device geometry. It is demonstrated that the temperature of the device increases by using a low-k dielectric and an air gap between the metal lines. In addition, when air spacers are used, the lattice temperature is further increased and the on current reduction ratio increases compared to the common spacer. Also, to release the thermal bottleneck to the substrate side, the metal pad size was adjusted and the composition of the Shallow Trench Isolation (SII) was changed.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"25 22","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133042319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of RC delay for high performance in LFET and VFET LFET和VFET高性能RC延迟分析
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242301
Changbeom Woo, Jongsu Kim, Myounggon Kang, Hyungcheol Shin
In this paper, we have investigated RC delay not only on single channel but also on multi-channels in lateral FET (LFET) and vertical FET (VFET). It has verified that there is always constant for SCEs regardless of the number of channels. Since all structures have the same gate length and spacer length, they have the same gate controllability. On the other hand, RC delay depends on the structure. Because VFET has more parasitic capacitance, it shows poor RC delay. As a result, LFET is more promising than VFET in high performance.
本文研究了横向场效应管(LFET)和垂直场效应管(VFET)中单通道和多通道的RC延迟。它已经证实,无论通道数量如何,sce都是恒定的。由于所有结构都具有相同的栅极长度和间隔长度,因此它们具有相同的栅极可控性。另一方面,RC延迟取决于结构。由于VFET的寄生电容较大,其RC延迟较差。因此,在高性能方面,LFET比VFET更有前景。
{"title":"Analysis of RC delay for high performance in LFET and VFET","authors":"Changbeom Woo, Jongsu Kim, Myounggon Kang, Hyungcheol Shin","doi":"10.23919/SNW.2017.8242301","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242301","url":null,"abstract":"In this paper, we have investigated RC delay not only on single channel but also on multi-channels in lateral FET (LFET) and vertical FET (VFET). It has verified that there is always constant for SCEs regardless of the number of channels. Since all structures have the same gate length and spacer length, they have the same gate controllability. On the other hand, RC delay depends on the structure. Because VFET has more parasitic capacitance, it shows poor RC delay. As a result, LFET is more promising than VFET in high performance.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115588628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of parasitic capacitance and performance in gate-ail-around and tri-gate channel vertical FET 栅极环极和三栅极沟道垂直场效应管的寄生电容和性能分析
Pub Date : 2017-06-01 DOI: 10.23919/SNW.2017.8242298
Youngsoo Seo, Myounggon Kang, Hyungcheol Shin
The parasitic capacitances in Vertical FET(VFET) are investigated. Vertical device has additional parasitic capacitance compared with lateral device because of deeply contacted drain metal. This parasitic capacitance degrades the performance of the device. In this study, tri-gate channel VFET which eliminates the additional parasitic capacitance without broadening the device area is proposed.
研究了垂直场效应管(VFET)的寄生电容。由于漏极金属的深度接触,垂直装置比横向装置具有额外的寄生电容。这种寄生电容会降低器件的性能。在这项研究中,提出了一种消除附加寄生电容而不扩大器件面积的三栅极沟道VFET。
{"title":"Analysis of parasitic capacitance and performance in gate-ail-around and tri-gate channel vertical FET","authors":"Youngsoo Seo, Myounggon Kang, Hyungcheol Shin","doi":"10.23919/SNW.2017.8242298","DOIUrl":"https://doi.org/10.23919/SNW.2017.8242298","url":null,"abstract":"The parasitic capacitances in Vertical FET(VFET) are investigated. Vertical device has additional parasitic capacitance compared with lateral device because of deeply contacted drain metal. This parasitic capacitance degrades the performance of the device. In this study, tri-gate channel VFET which eliminates the additional parasitic capacitance without broadening the device area is proposed.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124839824","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2017 Silicon Nanoelectronics Workshop (SNW)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1